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Galvanic Etching of Silicon

For Fabrication of Micromechanical Structures

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IOS Press is an international science, technical and medical publisher of high-quality books for academics, scientists, and professionals in all fields. Some of the areas we publish -Biomedicine-Oncology-Artificial intelligence-Databases and information systems-Maritime engineering-Nanotechnology-Geoengineering-All aspects of physics-E-governance-E-commerce-The knowledge economy-Urban studies-Arms control-Understanding and responding to terrorism-Medical informatics-Computer Sciences

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Galvanic Etching of Silicon, Colin M. A. Ashruf

Langue
Année de publication
2000
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Titre
Galvanic Etching of Silicon
Sous-titre
For Fabrication of Micromechanical Structures
Langue
Anglais
Éditeur
IOS Press
Publié
2000
Format
souple
Pages
157
ISBN10
9040720010
ISBN13
9789040720017
Séries
Description
IOS Press is an international science, technical and medical publisher of high-quality books for academics, scientists, and professionals in all fields. Some of the areas we publish -Biomedicine-Oncology-Artificial intelligence-Databases and information systems-Maritime engineering-Nanotechnology-Geoengineering-All aspects of physics-E-governance-E-commerce-The knowledge economy-Urban studies-Arms control-Understanding and responding to terrorism-Medical informatics-Computer Sciences