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Semiconductor Materials and Process Technology Handbook

For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI)

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This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.

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Semiconductor Materials and Process Technology Handbook, Gary E. McGuire

Langue
Année de publication
1988
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Titre
Semiconductor Materials and Process Technology Handbook
Sous-titre
For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI)
Langue
Anglais
Publié
1988
Format
rigide
Pages
688
ISBN10
0815511507
ISBN13
9780815511502
Séries
Description
This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.