Epitaxy of Semiconductors

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Focusing on semiconductor heterostructures, this textbook serves as a comprehensive guide for graduate students in materials science and electrical engineering. It covers essential topics such as the structural and electronic properties of strained layers, growth thermodynamics, and key techniques like metalorganic vapor-phase and molecular-beam epitaxy. The second edition expands on in situ growth monitoring and the properties of dislocations, featuring over 300 illustrations to enhance understanding. Minimal prior knowledge of solid-state physics is needed, making it accessible for a broad audience.