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High resolution X-ray scattering from thin films to lateral nanostructures

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During the last 20 years interest in high-resolution x-ray diffractometry and reflectivity has grown as a result of the development of the semiconductor industry and the increasing interest in material research of thin layers of magnetic, organic, and other materials.

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High resolution X-ray scattering from thin films to lateral nanostructures, Ullrich Pietsch

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2004
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